In this experiment, 3M's abrasive pad is used as a solid abrasive. It is of great significance to study the subsurface damage of solid abrasive for improving the damage resistance threshold of optical components. Studies show that pure fused quartz glass has a high intrinsic damage threshold, but fused quartz glass will inevitably introduce a large number of subsurface damage during the process of grinding and polishing, and these subsurface damage is one of the important factors leading to the decline of laser damage resistance of optical components. With the increasing energy of high power laser devices, the laser-induced damage of optical components, especially fused quartz components, has become one of the core problems in the development of high power laser devices.
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